Sales Manager: Mr. Peng
Tel: +86 136 0112 5769
E-mail:sales@technol.cn
Feature/Function:
* Integrated design, less occupied area, competitive price, stable performance and low maintenance costs;
* Suitable for laboratory preparation of metal mono-membrane,
semiconductor film, organic film, also can be used for pre-production
process test;
* Suitable for the preparation of optical film, conductive film, semiconductor film, ferroelectric film, etc.;
Application: Colleges & universities, research institutes and enterprises develop new thin film materials and samll batch production.
Technical Parameters
Equipment Name | E-beam Evaporator |
Model | TEMD600 |
Chamber Structure | Vertical cylindrical side door structure, rear pumping system |
Chamber Size | Φ600×H750mm |
Baking Temperature | Room temperature~300℃(572℉) |
Rotating Substrate Holder | Plane≤Φ300mm, sphere≤Φ450mm |
Film Thickness Nonuniformity | ≤±5.0% |
Kaufman Ion Source | Optional |
Evaporation Source | 4~6 Cave crucibles(optional)/2 groups of evaporation sources |
Control Method | PLC Control/IPC automatic control(optional) |
Occupied Area | (Mainframe) L1500×W850×H1850mm |
Power | ≥20kW |