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E-beam Evaporator TEMD600

Feature/Function:

* Integrated design, less occupied area, competitive price, stable performance and low maintenance costs;
* Suitable for laboratory preparation of metal mono-membrane, semiconductor film, organic film, also can be used for pre-production process test;
* Suitable for the preparation of optical film, conductive film, semiconductor film, ferroelectric film, etc.;


Application: Colleges & universities, research institutes and enterprises develop new thin film materials and samll batch production.


Technical Parameters

Equipment NameE-beam Evaporator
ModelTEMD600
Chamber StructureVertical cylindrical side door structure, rear pumping system
Chamber SizeΦ600×H750mm
Baking TemperatureRoom temperature~300(572)
Rotating Substrate HolderPlane≤Φ300mm, sphere≤Φ450mm
Film Thickness Nonuniformity≤±5.0%
Kaufman Ion SourceOptional
Evaporation Source4~6 Cave crucibles(optional)/2 groups of evaporation sources
Control MethodPLC Control/IPC automatic control(optional) 
Occupied Area(Mainframe) L1500×W850×H1850mm
Power≥20kW