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Industry Knowledge

Vacuum Common Data and Unit Conversion

2018-10-28 Onclick:

1. Ranges of vacuum division

 

Ranges of   Vacuum

Pressure range

(Torr)

(Pa)

Low vacuum (LV)

760~10

1013251333

Medium vacuum(MV)

10~10-3

13331.33×10-1

High vacuum(HV)

10-3~10-8

1.33×10-110-6

Ultra high vacuum (UHV)

10-8~10-12

10-610-10

Extreme high vacuum(XHV)

10-12

10-10


2. Flow rate and leak rate

 


Pa·l/s

mbar·l/s

Torr·l/s

atm·cm3/s

sccm

1Pa·l/s

1

10

7.5

9.87

59.2

1 mbar·l/s

0.1

1

0.75

0.987

5.92

1 Torr·l/s

0.133

1.33

1

1.32

78.9

1   atm·cm3/s

0.101

1.01

0.76

1

60

1 sccm

1.69×10-3

1.69×10-2

1.27×10-2

1.67×10-2

1


3. Pumping rate unit conversion table

 

 

Unit

立方米/
  (m
3/s)

/(L/s)

立方米/小时

立方英尺/

1立方米/(1m3/s)

1

1000

3600

2118.88

1/(1L/s)

10-3

1

3.6

2.119

1立方米/小时(1m3/h)

2.78×10-4

0.278

1

0.59

1立方英尺/(1cft/min)

4.72×10-4

0.47

1.69

1


4. Common pressure unit conversion table

 



  Pa


  Torr

微米汞柱
  μmHg

微巴
  μbar

毫巴
  mbar

大气压
  atm

工程大气压
  am

英寸汞柱
  inHg

/英寸2
  lb/in
2

1 Pa

1

7.5
  ×10
-3

7.5

10

10-2

9.86923
  ×10
-6

1.0197
  ×10
5

2.953
  ×10
-4

1.450
  ×10
-4

1 Torr

133.32

1

103

1333.2

1.3332

1.31579
  ×10
-3

1.3595
  ×10
-3

3.937
  ×10
-2

1.934
  ×10
-2

1 μmHg

0.13332

10-3

1

1.3332

1.3332
  ×10
-3

1.31579
  ×10
-6

1.3595
  ×10
-6

3.937
  ×10
-5

1.934
  ×10
-5

1 μbar

10-1

7.5
  ×10
-4

7.5
  ×10
-1

1

10-3

9.86923
  ×10
-7

1.0197
  ×10
-6

2.953
  ×10
-5

1.450
  ×10
-5

1 mbar

102

7.5
  ×10
-1

7.5
  ×10
2

103

1

9.86923
  ×10
-4

1.0197
  ×10
-3

2.953
  ×10
-2

1.450
  ×10
-2

1 atm

101325

760

760×103

1013.25
  ×10
3

1013.25

1

1.0333

29.921

14.696

1 am

98066.3

735.56

735.56
  ×10
3

980663

980663
  ×10
-3

0.967839

1

28.959

14.223

1 inHg

3386

25.4

25.4×103

3.386×104

33.86

3.342
  ×10
-2

3.453
  ×10
-2

1

4.912
  ×10
-1

1 lb/in2

6895

51.715

51.715
  ×10
3

6.895×104

68.95

6.805
  ×10
-2

7.031
  ×10
-2

2.086

1


5. 20 ℃ air under different pressure of molecular mean free path

 

P()

1

10-3

10-4

10-5

10-6

10-9

λ(厘米)

4.72×10-3

4.72

47.2

472

4720

4.72×106


6. Air molecular density at different pressures

 

P()

1

10-3

10-4

10-5

10-6

10-9

n0(/厘米3)

4×1016

4×1013

4×1012

4×1011

4×1010

4×107


7. Various rubber properties table

 

Rubber type

Natural rubber

Butyl rubber

Nitrile rubber

Fluororubber

Feature 1

Water resistance, acid resistance, good   alkali resistance

Low penetration rate

Good oil resistance

23 Type strong acid resistance

Feature2

Large gas output

serious sublimation

Better elasticity

26 Type Low permeability and   low gas output rate

Vacuum range

1×105

107

108

10-8

Temperature

30~80℃

30~150℃

30~120℃

-20~200℃


8. Type of vacuum pump and scope of work 

Vacuum pump

Working range(Torr)

Vacuum pump

Working range(Torr)

Sliding-vane rotary vacuum pump

760~5×10-4

Piston vacuum pump

760~10-2

Rotary plunger vacuum pump

760~5×10-3

Sorption pump

760~10-4

Oil booster pump

10-1~10-4

Sputter ion pump

10-4~10-10

Roots vacuum pump

10-1~10-4

Titanium sublimation pump

10-3~10-10

Oil diffusion pump

10-3~5×10-7

Molecular pump

10-3~10-10

Water-ring vacuum pump

760~25

Cryopump

10-3~10-10