Evaporator Sputtering Ion


General Manager: Mr. Shi
Mobile: +86 185 1019 5926
Sales Manager: Mr. Zhu

Mobile: +86 136 0112 3129


Technical Support: Mr. Lee

Mobile: +86 136 0112 5769


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Thermal Evaporator ZHDS400


1. Integrated design, less occupied area, competitive price, stable performance and low maintenance costs;
2. Equipped with 4 to 6 groups of evaporation sources, compatible with organic evaporation and inorganic evaporation, multi-source co-evaporation obtain composite film / partial evaporation obtain multi-layer film, powerful and stable performance;
3. Suitable for laboratory preparation of metal mono film, semiconductor film, organic film, also can be used for pre-production process test, etc.;
4. Suitable for organic combination of evaporation coating and glove box environment, to achieve evaporation, encapsulation, testing and other process seamless docking, widely used in perovskite solar cell / OPV organic solar cell, OLED film and other research systems, etc..


Technical Parameters:

Equipment Name Thermal Evaportation System with Glove-box
Model ZHDS400
Coating Method Multi-source evaporation coating
Chamber Structure Box-type front and rear door structure, equipped with glovebox
Chamber Size L400×W440×H450mm
Baking Temperature Room temperature to 300℃ (572℉)
Rotating Substrate Holder 120mm×120mm
Substrate Holder Lift Manually adjust the lifting height between 0 to 80mm
Film Thickness Nonuniformity ≤±5.0%
Evaporation Source 2~3 Groups of metal sources, 2~4 groups of organic sources
Control Method PLC control
Occupied Area

(Mainframe) L1100×W780×H1800mm

Glove-box size can be customized

Power ≥10Kw


Application: It is widely used in the research and small batch preparation of new film materials for colleges & universities, research institutes and enterprises.