PRODUCTS

General Manager: Mr. Shi
Mobile: +86 185 1019 5926
E-mail:shige@technol.cn
Sales Manager: Mr. Zhu

Mobile: +86 136 0112 3129

E-mail:zhujiaqiang@technol.cn

Technical Support: Mr. Lee

Mobile: +86 136 0112 5769

E-mail:lichangdong@technol.cn

HOME >PRODUCTS > Thermal Evaporation > E-beam Evaporator

E-beam Evaporator TEMD500


Features:

1. Integrated design, less occupied area, competitive price, stable performance and low maintenance costs;
2. Suitable for laboratory preparation of metal mono-membrane, semiconductor film, organic film, also can be used for pre-production process test;
3. Suitable for the preparation of optical film, conductive film, semiconductor film, ferroelectric film, etc.;

 

Technical Parameters:

Equipment Name E-beam (Electron Beam) Evaporator
Model TEMD500
Chamber Structure Vertical cylindrical side door structure, rear pumping system
Chamber Size Φ500×H650mm
Baking Temperature Room temperature to 300℃ (572℉)
Rotating Substrate Holder   Flat-plate Φ200mm
Film Thickness Nonuniformity ≤±5.0%
Kaufman Ion Source Optional
Evaporation Source 4~6 Cave crucibles (optional) / 2 groups of evaporation sources
Control Method PLC Control / IPC automatic control (optional)
Occupied Area (Mainframe) L1500×W850×H1750mm
Power ≥20Kw

 

Application: It is widely used in the research and small batch preparation of new film materials for colleges & universities, research institutes and enterprises.