General Manager: Mr. Shi
Mobile: +86 185 1019 5926
E-mail:shige@technol.cn
Sales Manager: Mr. Zhu
Mobile: +86 136 0112 3129
E-mail:zhujiaqiang@technol.cn
Technical Support: Mr. Lee
Mobile: +86 136 0112 5769
E-mail:lichangdong@technol.cn
Features:
1. Integrated design, less occupied area, competitive price, stable performance and low maintenance costs;
2. Suitable for laboratory preparation of metal mono-membrane, semiconductor film, organic film, also can be used for pre-production process test;
3. Suitable for the preparation of optical film, conductive film, semiconductor film, ferroelectric film, etc.;
Technical Parameters：
| Equipment Name | E-beam (Electron Beam) Evaporator |
| Model | TEMD600 |
| Chamber Structure | Vertical cylindrical side door structure, rear pumping system |
| Chamber Size | Φ600×H750mm |
| Baking Temperature | Room temperature to 300℃ (572℉) |
| Rotating Substrate Holder | Plane≤Φ300mm, sphere≤Φ450mm |
| Film Thickness Nonuniformity | ≤±5.0% |
| Kaufman Ion Source | Optional |
| Evaporation Source | 4~6 Cave crucibles (optional) / 2 groups of evaporation sources |
| Control Method | PLC Control / IPC automatic control (optional) |
| Occupied Area | (Mainframe) L1500×W850×H1850mm |
| Power | ≥20Kw |
Application: It is widely used in the research and small batch preparation of new film materials for colleges & universities, research institutes and enterprises.
